High-precision XY stage, ironless 3-phase linear motor; 102 mm x 102 mm travel range (X × Y); 100 N load capacity; 500 mm/s × 500 mm/s maximum velocity; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak
V-738 High-Precision XY Stage
Clear Aperture, High Run-Out Accuracy and Stability, Linear Motors
- Travel range 102 mm × 102 mm (4")
- Large aperture, 150 mm × 150 mm
- Unidirectional repeatability to 0.1 µm
- Velocity to 500 mm/s
- 3-phase linear motor
- High-resolution incremental linear encoder
Linear motors
Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.
Recirculating ball bearings
When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded recirculating ball bearing units, which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Other travel ranges on request.
Application fields
Medical industry. Laser cutting. Scanning. Biotechnology. Measuring technology. AOI (Automatic Optical Inspection). Microscopy.
Specifications
Specifications
Motion | V-738.056111 | Tolerance |
---|---|---|
Active axes | X ǀ Y | |
Travel range in X | 102 mm | |
Travel range in Y | 102 mm | |
Acceleration in X, unloaded | 10 m/s² | max. |
Acceleration in Y, unloaded | 10 m/s² | max. |
Maximum velocity in X, unloaded | 500 mm/s | |
Maximum velocity in Y, unloaded | 500 mm/s | |
Orthogonality | ± 96.96 µrad | typ. |
Straightness error E_XY (straightness) | ± 2 µm | typ. |
Straightness error E_YX (straightness) | ± 2 µm | typ. |
Straightness error E_ZX (flatness) | ± 2 µm | typ. |
Straightness error E_ZY (flatness) | ± 2 µm | typ. |
Angular error E_AY (pitch) | ± 40 µrad | typ. |
Angular error E_BX (pitch) | ± 40 µrad | typ. |
Angular error E_CX (yaw) | ± 20 µrad | typ. |
Angular error E_CY (yaw) | ± 20 µrad | typ. |
Positioning | V-738.056111 | Tolerance |
Minimum incremental motion in X | 0.02 µm | typ. |
Minimum incremental motion in Y | 0.02 µm | typ. |
Unidirectional repeatability in X | ± 0.05 µm | typ. |
Unidirectional repeatability in Y | ± 0.05 µm | typ. |
Bidirectional repeatability in X | 0.5 µm | typ. |
Bidirectional repeatability in Y | 0.5 µm | typ. |
Reference switch | Forked photoelectric sensor, N/C contact, 5 V, NPN | |
Limit switches | Forked photoelectric sensor, N/C contact, 5 V, NPN | |
Integrated sensor | Incremental linear encoder | |
Sensor signal | Sin/cos, 1 V peak-to-peak | |
Sensor signal period | 20 µm | |
System resolution in X | 1 nm | |
System resolution in Y | 1 nm | |
Drive properties | V-738.056111 | Tolerance |
Drive type | Ironless 3-phase linear motor | |
Operating voltage | 48 V | |
Nominal voltage | — | |
Peak voltage | — | |
Nominal current, RMS | 4.4 A | typ. |
Peak current, RMS | 15 A | typ. |
Drive force in X | 87 N | typ. |
Drive force in Y | 87 N | typ. |
Peak force in X | 200 N | |
Peak force in Y | 200 N | |
Force constant | — | |
Motor constant | 71 N/√W | typ. |
Time constant | 0.4 ms | |
Resistance phase-phase | 3.6 Ω | typ. |
Inductance phase-phase | 1.2 mH | |
Back EMF phase-phase | 16 V·s/m | max. |
Pole pitch N-N | 30 mm | |
Mechanical properties | V-738.056111 | Tolerance |
Permissible push force in Z | 100 N | max. |
Permissible torque in θX | 130 N·m | max. |
Permissible torque in θY | 130 N·m | max. |
Permissible torque in θZ | 90 N·m | max. |
Moved mass in X, unloaded | 16800 g | |
Moved mass in Y, unloaded | 8000 g | |
Guide | Recirculating ball bearing guide | |
Overall mass | 24000 g | |
Material | Aluminum, black anodized | |
Miscellaneous | V-738.056111 | Tolerance |
Operating temperature range | 5 to 40 °C | |
Connector | 2 × HD D-sub 26 (m) | |
Sensor connector | 2 × D-sub 15 (f) | |
Recommended controllers/drivers | G-901.R319 C-891.130300 C-885 with C-891.11C885 ACS modular controller |
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Downloads
Datasheet
Documentation
User Manual MP183
L-738 / V-738 Precision XY Stage
3D Models
3-D model V-738
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