N-310.10
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 10 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310 NEXACT® OEM Miniature Linear Motor / Actuator
Compact, Fast, with Long Travel Range, PiezoWalk® Principle
- Travel range 10 to 125 mm, variable runner lengths
- Compact in size, inexpensive design
- Resolution to 0.03 nm
- Push force up to 10 N
N-310, dimensions in mm. Runner length L = travel range + 40 mm.
N-310 NEXACT® OEM Miniature Linear Motor / Actuator
Product Description
Specifications
Downloads
Quote / Order
Application fields
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Lithography
- Nanoimprinting
- Nanometrology
Nanometer precision and high feed force with PiezoWalk® walking drives
In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Specifications
Specifications
| Motion | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | |
| Travel range in X | 10 mm | 20 mm | 50 mm | 75 mm | 100 mm | 125 mm | |
| Travel range in X (analog mode) | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | max. |
| Maximum velocity in X, unloaded | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | |
| Positioning | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
| Step size in full step mode | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | 10 µm | |
| Resolution in X, open loop | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | 0.03 nm | typ. |
| Drive Properties | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
| Drive type | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | NEXACT® piezo walking drive | |
| Operating voltage | -10 to +45 V | -10 to +45 V | -10 to +45 V | -10 to +45 V | -10 to +45 V | -10 to +45 V | |
| Drive force in positive direction of motion in X | 10 N | 10 N | 10 N | 10 N | 10 N | 10 N | max. |
| Drive force in negative direction of motion in X | 10 N | 10 N | 10 N | 10 N | 10 N | 10 N | max. |
| Mechanical Properties | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
| Holding force in X, passive | 12 N | 12 N | 12 N | 12 N | 12 N | 12 N | max. |
| Overall mass | 50 g | 50 g | 50 g | 50 g | 50 g | 50 g | ±5 % |
| Material | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | Stainless steel, ceramic; cable: PFA, PTFE | |
| Miscellaneous | N-310.10 | N-310.11 | N-310.13 | N-310.14 | N-310.15 | N-310.16 | Tolerance |
| Operating temperature range | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | 0 to 50 °C | |
| Connector | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | HD D-sub 15-pin (m) | |
| Cable length | 1.5 m | 1.5 m | 1.5 m | 1.5 m | 1.5 m | 1.5 m | ±10 mm |
| Recommended controllers / drivers | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 | E-712, E-861, E-861.11C885, E-862 |
Maximum velocity in X, unloaded: Depending on the drive electronics.
Resolution in X, open loop: Depending on the drive electronics.
Recommended controllers / drivers:
E-712 - Modular, high performance for highest precision and velocity
E-861 - Cost effective NEXACT® controller for 1 channel
E-861.11C885 - NEXACT® controller module for modular controller system C-885
E-862 - Cost effective open-loop driver
Downloads
Product Note
Product Note
Product Change Notification N-310.XX-N-47X.XX
Version / Date
2023-01-23
pdf - 86 KB
Datasheet
Documentation
Documentation
User Manual N310T0012
N-310 NEXACT® OEM Miniature Linear Drive
Version / Date
2024-07-12
pdf - 971 KB
English
3D Models
3D Models
N-310 3-D model
zip - 682 KB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
N-310.11
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 20 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310.13
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 50 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310.14
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 75 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310.15
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 100 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
N-310.16
NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 125 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length
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Compatible Electronics
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Technology
PiezoWalk® Walking Drives
PiezoWalk® drives were developed more than 10 years ago for the semiconductor industry, a demanding industry when it comes to reliability, position resolution and long-term stability.
Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
Incremental Sensors
PI uses incremental measurement systems for longer travel ranges, starting from approximately one millimeter. These sensors, which in most cases are optical sensors, achieve position resolution down to the picometer range.
Multi-Axis Positioners
Hexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes, and three rotational axes.